Shutdown asml SNF 2008-02-08 09:08:11: Cannot ignite lamp
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Fri Feb 8 09:08:12 PST 2008
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Shutdown asml SNF 2008-02-03 09:04:06: wafers stuck in the tool.
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Shutdown asml SNF 2008-02-08 09:08:11: Cannot ignite lamp
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Unable to start lamp after power spike.
Previous message:
Shutdown asml SNF 2008-02-03 09:04:06: wafers stuck in the tool.
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Shutdown asml SNF 2008-02-08 09:08:11: Cannot ignite lamp
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