Shutdown asml SNF 2008-02-08 11:05:16: Lamp Change
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Fri Feb 8 11:05:17 PST 2008
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Shutdown asml SNF 2008-02-08 09:08:11: Cannot ignite lamp
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Shutdown asml SNF 2008-02-08 11:05:16: Lamp Change
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Lamp is being changed by ASML FSE
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Shutdown asml SNF 2008-02-08 09:08:11: Cannot ignite lamp
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Shutdown asml SNF 2008-02-08 11:05:16: Lamp Change
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