Shutdown asml SNF 2008-02-08 11:05:16: Lamp Change
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Fri Feb 8 13:21:09 PST 2008
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Shutdown asml SNF 2008-02-08 11:05:16: Lamp Change
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Shutdown asml SNF 2008-02-10 18:26:12: Wafer stuck inside
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Lamp change completed. System OK to use
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Shutdown asml SNF 2008-02-10 18:26:12: Wafer stuck inside
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