Shutdown asml SNF 2008-02-10 18:26:12: Wafer stuck inside

ywidjaja at snf.stanford.edu ywidjaja at snf.stanford.edu
Sun Feb 10 18:26:12 PST 2008

Previous message: Shutdown asml SNF 2008-02-08 11:05:16: Lamp Change
Next message: Shutdown asml SNF 2008-02-10 18:26:12: Wafer stuck inside
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Ran 1 wafer.  Received "failed to load" error message.  The wafer is still inside.

Previous message: Shutdown asml SNF 2008-02-08 11:05:16: Lamp Change
Next message: Shutdown asml SNF 2008-02-10 18:26:12: Wafer stuck inside
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the asml-pcs mailing list