Shutdown asml SNF 2008-02-10 18:26:12: Wafer stuck inside

ywidjaja at snf.stanford.edu ywidjaja at snf.stanford.edu
Sun Feb 10 18:26:12 PST 2008


Ran 1 wafer.  Received "failed to load" error message.  The wafer is still inside.




More information about the asml-pcs mailing list