Shutdown asml SNF 2008-02-10 18:26:12: Wafer stuck inside

gsosa at gsosa at
Mon Feb 11 08:47:24 PST 2008

Wafer fell off the dipod while trying to transfer from pre-aligner to exposure chuck. Was able to retrieve wafer that was lying in the wafer stage. Cleaed the dipod, pre-aligner and robot surfaces. Cycled 10 wafers through system. Daily checks OK. Users wafer appears to not have Edge bead removal due to resist migration to the back of the wafer surface. There also appears to be contamination further in from edge that was most likely picked up at a dirty hotplate. PLEASE!!- Inspect the backs of your wafers and take nessesary action to ensure cleanliness. 

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