Comment asml SNF 2008-02-18 10:27:40: Logfile full.
chughes at snf.stanford.edu
chughes at snf.stanford.edu
Mon Feb 18 10:27:41 PST 2008
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Shutdown asml SNF 2008-02-10 18:26:12: Wafer stuck inside
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Shutdown asml SNF 2008-02-20 16:34:54: wafer stuck; wafer stage won't initialize
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The logfile appears to be full.
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Shutdown asml SNF 2008-02-10 18:26:12: Wafer stuck inside
Next message:
Shutdown asml SNF 2008-02-20 16:34:54: wafer stuck; wafer stage won't initialize
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