Shutdown asml SNF 2008-02-20 16:34:54: wafer stuck; wafer stage won't initialize

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Wed Feb 20 16:34:55 PST 2008


Wafer is on robot arm and never went into p-chuck, but "remove wafers" brings up a screen showing no wafers to move.  Tried fast startup and full startup both without any change.  Wafer stage fails to initialize successfully.




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