Comment asml SNF 2008-02-21 08:20:41: asml
bindermann at snf.stanford.edu
bindermann at snf.stanford.edu
Thu Feb 21 08:20:43 PST 2008
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Shutdown asml SNF 2008-02-20 16:34:54: wafer stuck; wafer stage won't initialize
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The wafer was removed and the system was re-intialized. system up
Previous message:
Shutdown asml SNF 2008-02-20 16:34:54: wafer stuck; wafer stage won't initialize
Next message:
Shutdown asml SNF 2008-02-25 08:30:56: Monthly PM Due
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