Shutdown asml SNF 2008-02-27 16:46:25: a wafer lost in p-chuck

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Feb 28 08:22:06 PST 2008


Removed users wafer from the P-chuck. Cleaned the P-chuck and robot arm. tested transfer with 8 dummy wafers. all OK. Users quartz wafer tested on UTS granite. Wafer did not float. Suspect bowed or warped wafer. Did daily checks. All OK.




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