Problem asml SNF 2008-02-29 16:32:57: wafer stuck on the pchuck
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Fri Feb 29 16:32:57 PST 2008
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Shutdown asml SNF 2008-02-27 16:46:25: a wafer lost in p-chuck
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Problem asml SNF 2008-02-29 16:32:57: wafer stuck on the pchuck
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Gary is already working on it.
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Shutdown asml SNF 2008-02-27 16:46:25: a wafer lost in p-chuck
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Problem asml SNF 2008-02-29 16:32:57: wafer stuck on the pchuck
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