Problem asml SNF 2008-02-29 16:32:57: wafer stuck on the pchuck

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Feb 29 16:48:11 PST 2008


Retrieved stranded wafers from pre-aligner and robot. Tested wafer handling with dummy wafers- All OK. Users wafers do not look unusual on the back. They were ground down so they may be more grainy than normal. They did not stick on the UTS granite like warped wafers but they did not float so well either. User advised to retry wafers on Monday when there is more support available.,




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