From nppatil at snf.stanford.edu Thu Jul 3 20:12:34 2008 From: nppatil at snf.stanford.edu (nppatil at snf.stanford.edu) Date: Thu, 3 Jul 2008 20:12:34 -0700 Subject: Problem asml SNF 2008-07-03 20:12:33: Does not expose wafers Message-ID: There seemed to be two power glitches in the lab. The stepper rejects all wafers and displays the following warnings CT: WS Temperature (22.54C) is out of warning range [21.50 -22.50C]. CT: Incoming water temperature (22.51C) is out of warning range [21.00-22.50C] The machine log states: This wafer should not be started since CT status indicates an error; sensor status: All sensors ok. TCU status: Not ok Airco status: ok Particle counter status: ok Airfan status: ok CT driver status: IDLE. From shott at stanford.edu Thu Jul 3 21:52:27 2008 From: shott at stanford.edu (John Shott) Date: Thu, 03 Jul 2008 21:52:27 -0700 Subject: Power Glitch ..... Message-ID: <486DAC8B.9060009@stanford.edu> Folks: It appears as if we may have experienced some sort of power surge or instability at about 7:30 p.m. .... although I've heard no reports of lights flickering or other things. However, it appears as if all 3 banks of Tylan furnaces tripped .... their local main breakers appear to have been in something of an intermediate state. Also, at about the same time, the is the following report on the ASML: > There seemed to be two power glitches in the lab. The stepper rejects all wafers and displays the following warnings > CT: WS Temperature (22.54C) is out of warning range [21.50 -22.50C]. > CT: Incoming water temperature (22.51C) is out of warning range [21.00-22.50C] > The machine log states: > This wafer should not be started since CT status indicates an error; > sensor status: All sensors ok. > TCU status: Not ok > Airco status: ok > Particle counter status: ok > Airfan status: ok > CT driver status: IDLE. While it may be unrelated, it seems to have been suspiciously close .... or maybe it occurred when some of the Tylans were coming back on. In any event, by the time I arrived at 8:30 this evening, Eric had all of the Tylans back in operation with the exception of TEOS2. It is reporting a TCU error and is not applying power to the SCRs so I have shut it down. As I didn't know anything about the ASML, I figured that I shouldn't even check it. So, that's the news as of Friday evening .... have a good weekend, John From gsosa at snf.stanford.edu Sat Jul 5 12:32:23 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 5 Jul 2008 12:32:23 -0700 Subject: Problem asml SNF 2008-07-03 20:12:33: Does not expose wafers Message-ID: Power fluctuation late Thursday caused a TCU problem. Either the system or someone reset the TCU to recover from error and system stabilized OK. Verified by running the IQC test. All critical parameters includung focus look good. System is stable and in spec. OK to use. From chen0622 at snf.stanford.edu Mon Jul 7 17:11:54 2008 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Mon, 7 Jul 2008 17:11:54 -0700 Subject: Shutdown asml SNF 2008-07-07 17:11:53: system freezed Message-ID: No wafer is inside any chuck now. My wafer was stuck in the #3 output port after processed. The system is showing error message "Lamp exchange required soon". The user interface could not go back to main menu. From gsosa at snf.stanford.edu Tue Jul 8 08:43:35 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 8 Jul 2008 08:43:35 -0700 Subject: Shutdown asml SNF 2008-07-07 17:11:53: system freezed Message-ID: User attempted to expose wafer many times. System successfully rejected the wafer with no problems for what appeasrs to be leveling problems. On final attemp, the user initiated the batch abort . Also during the batch abort, the view definition screen was opened, as per the logging file. The system did not like that and the software got stuck in a loop. Had to reboot the system software and do a full start-up. Did daily checks. All looks OK. "Lamp exchange required soon" is a warning screen that pops up at 48 hours prior to a lamp change. From gsosa at snf.stanford.edu Tue Jul 8 11:51:57 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 8 Jul 2008 11:51:57 -0700 Subject: Shutdown asml SNF 2008-07-08 11:51:57: Scheduled lamp change Message-ID: ASM-L FSE replacing thge UV lamp. From gsosa at snf.stanford.edu Tue Jul 8 13:00:56 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 8 Jul 2008 13:00:56 -0700 Subject: Shutdown asml SNF 2008-07-08 11:51:57: Scheduled lamp change Message-ID: FSE completed lamp change and setup. System back up and ready to use. From ericp at snf.stanford.edu Wed Jul 9 00:51:01 2008 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Wed, 9 Jul 2008 00:51:01 -0700 Subject: Shutdown asml SNF 2008-07-09 00:51:01: wafers stuck (3) Message-ID: Machine ran three wafers just fine, then "Batch abort". I tried "remove wafers from machine" but it says "error occured". There are three wafers inside the machine. From gsosa at snf.stanford.edu Wed Jul 9 08:19:57 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 9 Jul 2008 08:19:57 -0700 Subject: Shutdown asml SNF 2008-07-09 00:51:01: wafers stuck (3) Message-ID: The last wafer not sensed at the pre-aligner station. Rempved the wafer from the P/A unit. Inspected back of wafer. There appears to be some sort of stripes on the back and the wafer does not float on the UTS granite(warped/bowed). Wiped down the P/A chuck. Did full start-up and daily checks. All OK. From jsuarez at snf.stanford.edu Wed Jul 9 13:56:59 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Wed, 9 Jul 2008 13:56:59 -0700 Subject: Problem asml SNF 2008-07-09 13:56:58: hotspot Message-ID: hotspot on lower right side of wafer From gsosa at snf.stanford.edu Wed Jul 9 14:45:10 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 9 Jul 2008 14:45:10 -0700 Subject: Problem asml SNF 2008-07-09 14:45:09: E-chuck needs cleaning Message-ID: ASM-L exposed and developed an E-chuck hotspot wafer. The wafer indicates that there is some contamination on the E-chuck surface wich can cause imaging problems. If you have critical layers, "DO NOT EXPOSE THEM". If you have non-critical layers, use at your own risk. FSE will be here tomorrow morning to clean the E-chuck. From mahnaz at snf.stanford.edu Thu Jul 10 14:42:17 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 10 Jul 2008 14:42:17 -0700 Subject: Shutdown asml SNF 2008-07-10 14:42:16: FSE to fix the hot spot Message-ID: Sorry the system has been down since 12:30. And will stay down till the focus comes in to the range. Gary will up date around 4 pm. From gsosa at snf.stanford.edu Thu Jul 10 17:12:31 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 10 Jul 2008 17:12:31 -0700 Subject: Problem asml SNF 2008-07-09 13:56:58: hotspot Message-ID: FSE came in and cleaned the wafer table surface. We found that a small area of the wafer table had photo-resist on it (about a 2 x 12 mm area) which caused the hot spot. This is totally unacceptable. In your training it is thoroghly stressed that wafers need to be inspected and necessary action taken if they are not clean.Exposed and developed another hotspot wafer which came out good. Also allowed tool to stabilize and updated focus with IQC test. All critical parameters are in spec. It is your responsibility to ensure that your wafers are clean before they can be processed in the stepper. Please take the extra time to inspect your wafers. This is a highly sensitive precision tool and many users depend on it to be in and optimized state to ensure good results. From gsosa at snf.stanford.edu Thu Jul 10 17:12:38 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 10 Jul 2008 17:12:38 -0700 Subject: Problem asml SNF 2008-07-09 14:45:09: E-chuck needs cleaning Message-ID: FSE came in and cleaned the wafer table surface. We found that a small area of the wafer table had photo-resist on it (about a 2 x 12 mm area) which caused the hot spot. This is totally unacceptable. In your training it is thoroghly stressed that wafers need to be inspected and necessary action taken if they are not clean.Exposed and developed another hotspot wafer which came out good. Also allowed tool to stabilize and updated focus with IQC test. All critical parameters are in spec. It is your responsibility to ensure that your wafers are clean before they can be processed in the stepper. Please take the extra time to inspect your wafers. This is a highly sensitive precision tool and many users depend on it to be in and optimized state to ensure good results. From gsosa at snf.stanford.edu Thu Jul 10 17:12:47 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 10 Jul 2008 17:12:47 -0700 Subject: Shutdown asml SNF 2008-07-10 14:42:16: FSE to fix the hot spot Message-ID: FSE came in and cleaned the wafer table surface. We found that a small area of the wafer table had photo-resist on it (about a 2 x 12 mm area) which caused the hot spot. This is totally unacceptable. In your training it is thoroghly stressed that wafers need to be inspected and necessary action taken if they are not clean.Exposed and developed another hotspot wafer which came out good. Also allowed tool to stabilize and updated focus with IQC test. All critical parameters are in spec. It is your responsibility to ensure that your wafers are clean before they can be processed in the stepper. Please take the extra time to inspect your wafers. This is a highly sensitive precision tool and many users depend on it to be in and optimized state to ensure good results. From emyers at snf.stanford.edu Sat Jul 12 19:41:41 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sat, 12 Jul 2008 19:41:41 -0700 Subject: Problem asml SNF 2008-07-12 19:41:40: Level Sensor Error Message-ID: The system will not restart after power glitch. Fast and Full Start-ups failed. I am leaving it in yellow light, since I don't know if it's a stabilization problem which may clear over time. From gsosa at snf.stanford.edu Sun Jul 13 10:42:27 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 13 Jul 2008 10:42:27 -0700 Subject: Problem asml SNF 2008-07-12 19:41:40: Level Sensor Error Message-ID: Level sensor failing to initialize. LS driver stuck in some limbo state due to power glitch. Could not clear with normal resets. Had to to complete system power down. Powered up system and performed startup sequence. All initialized OK. Re-started and stabilized lamp. Uniformity OK. Performed IQC test. All parameters OK, system is stable. Cycled 2 wafers through system with dummy job. All OK , system ready to use. From jsuarez at snf.stanford.edu Mon Jul 21 10:01:27 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Mon, 21 Jul 2008 10:01:27 -0700 Subject: Problem asml SNF 2008-07-21 10:01:26: System errort Message-ID: After exposing the wafer, screen reads "system error occurred: and the light went from green to red. From gsosa at snf.stanford.edu Mon Jul 21 13:31:52 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Jul 2008 13:31:52 -0700 Subject: Problem asml SNF 2008-07-21 10:01:26: System errort Message-ID: Users reticle is new and has a pellilce. It appears that the pellicle frame is too wide and does not fit correctly in the reticle smif pod. User reticle removed from system. Did system full start-up. Tested reticle system with standard reticles. All OK. From gsosa at snf.stanford.edu Wed Jul 30 09:07:00 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 30 Jul 2008 09:07:00 -0700 Subject: Shutdown asml SNF 2008-07-30 09:06:59: Monthly PM Message-ID: Monthly PM in progress From gsosa at snf.stanford.edu Wed Jul 30 15:11:42 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 30 Jul 2008 15:11:42 -0700 Subject: Shutdown asml SNF 2008-07-30 09:06:59: Monthly PM Message-ID: Monthly PM completed by ASML F/S. From gsosa at snf.stanford.edu Thu Jul 31 11:52:15 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 31 Jul 2008 11:52:15 -0700 Subject: Shutdown asml SNF 2008-07-31 11:52:15: Tool stabilizing Message-ID: Tool is stabilizing after ASML had system open to work on the stone. We will retest IQC this afternoon and release the tool. From gsosa at snf.stanford.edu Thu Jul 31 13:21:43 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 31 Jul 2008 13:21:43 -0700 Subject: Shutdown asml SNF 2008-07-31 11:52:15: Tool stabilizing Message-ID: Rechecked focus with IQC test. All looks OK. Stepper OK to use. From mahnaz at snf.stanford.edu Thu Jul 31 17:15:50 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 31 Jul 2008 17:15:50 -0700 Subject: Comment asml SNF 2008-07-31 17:15:49: black handle are broken Message-ID: Please do not attempt to swing out the stone, even if it is to clean the table. Both bolts broke off of the black handle so the lever arm where the stone rests on has no stop point. Probable cause is due to the bolts were a little loose and over time became bent causing them to seize when removing the bolts. We removed this part of the lever arm, but we were unable to remove the bolts, so we will have to order a new part. It is a factory part and will have to come from Veldhoven. Most likely it will be sometime next week when we recieve it. The tool is fully operational, and the stone can still be swung out if needed. It just requires the stone in/out box to do so, and it should be done with care(someone well trained). You can page me at 1.888.263.3803 if needed to swing out the stone. Regards, Warlito