Problem asml SNF 2008-07-03 20:12:33: Does not expose wafers

nppatil at snf.stanford.edu nppatil at snf.stanford.edu
Thu Jul 3 20:12:34 PDT 2008


There seemed to be two power glitches in the lab. The stepper rejects all wafers and displays the following warnings
CT: WS Temperature (22.54C) is out of warning range [21.50 -22.50C].
CT: Incoming water temperature (22.51C) is out of warning range [21.00-22.50C]
The machine log states:
This wafer should not be started since CT status indicates an error; 
sensor status: All sensors ok.
TCU status: Not ok
Airco status: ok
Particle counter status: ok
Airfan status: ok
CT driver status: IDLE.




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