Problem asml SNF 2008-07-03 20:12:33: Does not expose wafers

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sat Jul 5 12:32:23 PDT 2008


Power fluctuation late Thursday caused a TCU problem.  Either the system or someone reset the TCU to recover from error and system stabilized OK. Verified by running the IQC test. All critical parameters includung focus look good. System is stable and in spec. OK to use.




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