Shutdown asml SNF 2008-07-07 17:11:53: system freezed

chen0622 at chen0622 at
Mon Jul 7 17:11:54 PDT 2008

No wafer is inside any chuck now.  My wafer was stuck in the #3 output port after processed.  The system is showing error message "Lamp exchange required soon".  The user interface could not go back to main menu.     

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