Shutdown asml SNF 2008-07-07 17:11:53: system freezed

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Jul 8 08:43:35 PDT 2008


User attempted to expose wafer many times. System successfully rejected the wafer with no problems for what appeasrs to be leveling problems. On final attemp, the user initiated the batch abort . Also during the batch abort, the view definition screen was opened, as per the logging file. The system did not like that and the software got stuck in a loop. Had to reboot the system software and do a full start-up. Did daily checks. All looks OK. "Lamp exchange required soon" is a warning screen that pops up at 48 hours prior to a lamp change.




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