Shutdown asml SNF 2008-07-09 00:51:01: wafers stuck (3)

ericp at snf.stanford.edu ericp at snf.stanford.edu
Wed Jul 9 00:51:01 PDT 2008

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Machine ran three wafers just fine, then 
"Batch abort".  I tried "remove wafers from machine" 
but it says "error occured".  
There are three wafers inside the machine.

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