Shutdown asml SNF 2008-07-09 00:51:01: wafers stuck (3)

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Jul 9 08:19:57 PDT 2008


The last wafer not sensed at the pre-aligner station. Rempved the wafer from the P/A unit. Inspected back of wafer. There appears to be some sort of stripes on the back and the wafer does not float on the UTS granite(warped/bowed). Wiped down the P/A chuck. Did full start-up and daily checks. All OK.




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