Problem asml SNF 2008-07-09 13:56:58: hotspot
jsuarez at snf.stanford.edu
jsuarez at snf.stanford.edu
Wed Jul 9 13:56:59 PDT 2008
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Shutdown asml SNF 2008-07-09 00:51:01: wafers stuck (3)
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Problem asml SNF 2008-07-09 13:56:58: hotspot
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hotspot on lower right side of wafer
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Shutdown asml SNF 2008-07-09 00:51:01: wafers stuck (3)
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Problem asml SNF 2008-07-09 13:56:58: hotspot
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