Problem asml SNF 2008-07-09 14:45:09: E-chuck needs cleaning

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Jul 9 14:45:10 PDT 2008


ASM-L exposed and developed an E-chuck hotspot wafer. The wafer indicates that there is some contamination on the E-chuck surface wich can cause imaging problems. If you have critical layers, "DO NOT EXPOSE THEM". If you have non-critical layers, use at your own risk. FSE will be here tomorrow morning to clean the E-chuck.




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