Problem asml SNF 2008-07-12 19:41:40: Level Sensor Error

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sun Jul 13 10:42:27 PDT 2008


Level sensor failing to initialize. LS driver stuck in some limbo state due to power glitch. Could not clear with normal resets. Had to to complete system power down. Powered up system and performed startup sequence. All initialized OK. Re-started and stabilized lamp. Uniformity OK. Performed IQC test. All parameters OK, system is stable. Cycled 2 wafers through system with dummy job. All OK , system ready to use.




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