Problem asml SNF 2008-07-21 10:01:26: System errort

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Jul 21 13:31:52 PDT 2008


Users reticle is new and has a pellilce. It appears that the pellicle frame is too wide and does not fit correctly in the reticle smif pod. User reticle removed from system. Did system full start-up. Tested reticle system with standard reticles. All OK.




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