Shutdown asml SNF 2008-07-31 11:52:15: Tool stabilizing

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Jul 31 11:52:15 PDT 2008


Tool is stabilizing after ASML had system open to work on the stone. We will retest IQC this afternoon and release the tool. 




More information about the asml-pcs mailing list