Shutdown asml SNF 2008-07-31 11:52:15: Tool stabilizing
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Thu Jul 31 13:21:43 PDT 2008
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Shutdown asml SNF 2008-07-31 11:52:15: Tool stabilizing
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Comment asml SNF 2008-07-31 17:15:49: black handle are broken
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Rechecked focus with IQC test. All looks OK. Stepper OK to use.
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Shutdown asml SNF 2008-07-31 11:52:15: Tool stabilizing
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Comment asml SNF 2008-07-31 17:15:49: black handle are broken
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