From gsosa at snf.stanford.edu Mon Jun 2 12:20:52 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 2 Jun 2008 12:20:52 -0700 Subject: Shutdown asml SNF 2008-06-02 12:20:52: Scheduled lamp change Message-ID: ASM-L is changing the UV lamp. From gsosa at snf.stanford.edu Mon Jun 2 13:12:54 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 2 Jun 2008 13:12:54 -0700 Subject: Shutdown asml SNF 2008-06-02 12:20:52: Scheduled lamp change Message-ID: The lamp change is completed. System ready for use. From king at snf.stanford.edu Tue Jun 3 10:16:13 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 3 Jun 2008 10:16:13 -0700 Subject: Comment asml SNF 2008-06-03 10:16:12: Energy sensor temperature error Message-ID: It worked on the second attempt. From gsosa at snf.stanford.edu Fri Jun 6 14:18:02 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Jun 2008 14:18:02 -0700 Subject: Comment asml SNF 2008-06-06 14:18:01: Stepper is up 6/6/08 Message-ID: ASM-L has completed their demo work and 3D align work. The stepper has been converted and set up for 4" wafer processing. The stepper is up and ready for use. Please continue to inspect the backs of your wafers for contamination. Take nessesary measuress to ensure backside cleanliness to avoid system problems due to wafer handling. Thanks From sanjah at snf.stanford.edu Sat Jun 14 22:54:08 2008 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Sat, 14 Jun 2008 22:54:08 -0700 Subject: Problem asml SNF 2008-06-14 22:54:07: The output lid locked Message-ID: Didn't unlock after the wafer was processed. 3 of my wafers in the output casette. If you remove them please put them in the wafer box on the asml table. From vilanova at snf.stanford.edu Mon Jun 16 11:19:08 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 16 Jun 2008 11:19:08 -0700 Subject: Problem asml SNF 2008-06-14 22:54:07: The output lid locked Message-ID: we have checked the system and we dont see any problem with it, maybe it was not enable or there was an issue with the casette. From gsosa at snf.stanford.edu Wed Jun 18 09:09:10 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 18 Jun 2008 09:09:10 -0700 Subject: Shutdown asml SNF 2008-06-18 09:09:09: Focud problem Message-ID: Focus and image tilt out of spec. Will notify ASM-L From binder.mann at asml.com Wed Jun 18 09:16:34 2008 From: binder.mann at asml.com (Binder Mann) Date: Wed, 18 Jun 2008 12:16:34 -0400 Subject: Shutdown asml SNF 2008-06-18 09:09:09: Focud problem In-Reply-To: <20080618160910.8A5002D6BC8@smtp1.stanford.edu> Message-ID: <0788D5A046D0134DB5F0CEF36E4EBF61EEC109@USWILX84.sn-us.asml.com> Hi All, We will perform monthly PM on the system along with all the follow up meterlogy checks. Keep you posted with the tool status. Regards, Binder -----Original Message----- From: gsosa at snf.stanford.edu [mailto:gsosa at snf.stanford.edu] Sent: Wednesday, June 18, 2008 09:09 To: asml-pcs at snf.stanford.edu Subject: Shutdown asml SNF 2008-06-18 09:09:09: Focud problem Focus and image tilt out of spec. Will notify ASM-L -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. From gsosa at snf.stanford.edu Wed Jun 18 15:14:01 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 18 Jun 2008 15:14:01 -0700 Subject: Shutdown asml SNF 2008-06-18 09:09:09: Focud problem Message-ID: ASM-L converted the tool to 8.90 software rev. They also checked and updated the system focus/tilts, R/B offsets and redefine the reference state. System is ready to use. Please make coral entries if there are any problems or unusual behavior with the tool. This is important because we need to know if 8.90 software has any problems. Thanks From mahnaz at snf.stanford.edu Thu Jun 19 10:05:23 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 19 Jun 2008 10:05:23 -0700 Subject: Comment asml SNF 2008-06-19 10:05:22: down time Message-ID: This is a reminder that ASML will be down Starting *Monday 23rd at 9am till Friday 27th at 5 pm for 3D calibration and qualification; this has been previously announced. *Yesterday during the pm the stage gave an error which we have been kind of aware of it. The tool needs to go down before Monday as well to get the stage ( stone) fixed.; this is critical to 3D calibration. we all trying to get things scheduled and I will let you know as soon as I Have the information. Please do not panic things might get switched around any way. *Also I like to take this opportunity and let you all know that Binder has decided to pursue happiness out side of ASML. Thursday 26th will be her last day if you like to come by and thank her for all she has done for us next week will be a good time. From gsosa at snf.stanford.edu Fri Jun 20 18:26:17 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Jun 2008 18:26:17 -0700 Subject: Comment asml SNF 2008-06-20 18:26:17: Stepper Status 6/20/08 Message-ID: Vendor daignosed problem. He will replace the rotary assembly tomorrow to repair stone problem. Stepper is back up and ready to use. From nvgirish at snf.stanford.edu Fri Jun 20 20:32:47 2008 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Fri, 20 Jun 2008 20:32:47 -0700 Subject: Problem asml SNF 2008-06-20 20:32:47: Wafer Handling and Alignment problem Message-ID: While exposing one of my wafers, the input stage stopped and gave a wafer handler error. Another ASML user helped me to Fast Start up the tool. The wafer went in but came out badly misaligned. Each die was misaligned differently and there was a drift pattern from top-bottom and left-right of the wafer. I checked the job and it was not changed. (Maybe the Fast Startup was not such a good idea) Please help and apologies for the inconvenience!! Girish From mahnaz at snf.stanford.edu Sat Jun 21 22:54:00 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Sat, 21 Jun 2008 22:54:00 -0700 Subject: Comment asml SNF 2008-06-21 22:53:59: Cylinder change Message-ID: Fse has changed cylinder and more stuff which I will report on Monday when I get the report. Bmc and Iqc test has been ran and looks good. From mahnaz at snf.stanford.edu Sat Jun 21 22:54:41 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Sat, 21 Jun 2008 22:54:41 -0700 Subject: Comment asml SNF 2008-06-21 22:54:40: SYstem up Message-ID: And ready to be used. Happy processing From yuhykr at snf.stanford.edu Sun Jun 22 13:25:45 2008 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Sun, 22 Jun 2008 13:25:45 -0700 Subject: Problem asml SNF 2008-06-22 13:25:45: reticle handling problem Message-ID: when exchage the reticle, I couldn't select Accept button on the screen after reading the reticle. From king at snf.stanford.edu Sun Jun 22 20:11:57 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sun, 22 Jun 2008 20:11:57 -0700 Subject: Problem asml SNF 2008-06-22 20:11:56: same reticle error as above Message-ID: It still works though. From gsosa at snf.stanford.edu Mon Jun 23 07:39:08 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 23 Jun 2008 07:39:08 -0700 Subject: Problem asml SNF 2008-06-22 13:25:45: reticle handling problem Message-ID: In the 8.90 software rev., this is normal as confirmed by ASM-L. After the barcodes have been read, the system will wait for the user to click on "Cancel" to exit this step. The mouse cursor will be a "ticking clock with an arrow sticking out if the side", and the "accept" button will not be active. Clicking on "Cancel" will return you to the "material handling" screen. From this point you can exit and go to "batch control" and continue your batch setup. From gsosa at snf.stanford.edu Mon Jun 23 07:39:45 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 23 Jun 2008 07:39:45 -0700 Subject: Problem asml SNF 2008-06-22 20:11:56: same reticle error as above Message-ID: In the 8.90 software rev., this is normal as confirmed by ASM-L. After the barcodes have been read, the system will wait for the user to click on "Cancel" to exit this step. The mouse cursor will be a "ticking clock with an arrow sticking out if the side", and the "accept" button will not be active. Clicking on "Cancel" will return you to the "material handling" screen. From this point you can exit and go to "batch control" and continue your batch setup. From gsosa at snf.stanford.edu Mon Jun 23 14:27:31 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 23 Jun 2008 14:27:31 -0700 Subject: Shutdown asml SNF 2008-06-23 14:27:30: 3-D Align Setup Message-ID: System is down for setup of 3D align upgrade. From mahnaz at snf.stanford.edu Mon Jun 23 17:52:37 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 23 Jun 2008 17:52:37 -0700 Subject: Comment asml SNF 2008-06-23 17:52:36: M3628 stone I/O up date Message-ID: This is the update from what has been done on the system on Saturday June 21th. Currently the wafer stage for m3628 will not turn out automatically under plc control. The stone positioning is very repeatable, and there is no need to worry about any metrology related drifts due to this issue. I confirmed the stone positioning repeatability by running fine wafer shifts between several iterations of turning the stone in and out using the level shifting tool. The problem is complicated by the fact that one digit of the PLC is burned out making it very difficult to determine exactly what step is failing during a in/out operation. I replaced the rotary cylinder last night as the rotary out vso died during troubleshooting on Friday. Currently, the movement is very smooth and steady. Based on the fact that I usually get an error 3? (question mark due to missing digit) while turning out the stone it still appears the the rotary cylinder never turns all the way out under plc control. I tried re-dressing the stage cabling as the cables appear to interfere with the turn out motion, but it had little to no affect. While checking the centering of the stone take over lever / latch, a bolt was broken which will need to be fixed at the next available opportunity. I'm confident that it is ok to start the 3D align work next week, however the stage will have to be manually turned out using the LST if any chuck cleans, or size conversions need to take place. I will make all the preparations to remove the bolt and arrange for time with Mahnaz. Warlito, I left the LST, 4" wafer handling calibration wafer, and the load sensor adjustment key on site under the OCU. I have the stone positioning tool if you need it. I took it out of the fab due to the fact that it was getting in the way of normal fab operation. regards, Chris Ringwelski From bindermann at snf.stanford.edu Thu Jun 26 16:48:58 2008 From: bindermann at snf.stanford.edu (bindermann at snf.stanford.edu) Date: Thu, 26 Jun 2008 16:48:58 -0700 Subject: Shutdown asml SNF 2008-06-23 14:27:30: 3-D Align Setup Message-ID: 3D align set up completed, Tool is up for users From bindermann at snf.stanford.edu Thu Jun 26 16:49:57 2008 From: bindermann at snf.stanford.edu (bindermann at snf.stanford.edu) Date: Thu, 26 Jun 2008 16:49:57 -0700 Subject: Comment asml SNF 2008-06-23 17:52:36: M3628 stone I/O up date Message-ID: Tool is up From bindermann at snf.stanford.edu Thu Jun 26 16:55:30 2008 From: bindermann at snf.stanford.edu (bindermann at snf.stanford.edu) Date: Thu, 26 Jun 2008 16:55:30 -0700 Subject: Problem asml SNF 2008-06-20 20:32:47: Wafer Handling and Alignment problem Message-ID: problem solved