Comment asml SNF 2008-06-03 10:16:12: Energy sensor temperature error
king at snf.stanford.edu
king at snf.stanford.edu
Tue Jun 3 10:16:13 PDT 2008
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Shutdown asml SNF 2008-06-02 12:20:52: Scheduled lamp change
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Comment asml SNF 2008-06-06 14:18:01: Stepper is up 6/6/08
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It worked on the second attempt.
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Shutdown asml SNF 2008-06-02 12:20:52: Scheduled lamp change
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Comment asml SNF 2008-06-06 14:18:01: Stepper is up 6/6/08
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