Comment asml SNF 2008-06-06 14:18:01: Stepper is up 6/6/08
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Fri Jun 6 14:18:02 PDT 2008
ASM-L has completed their demo work and 3D align work. The stepper has been converted and set up for 4" wafer processing. The stepper is up and ready for use. Please continue to inspect the backs of your wafers for contamination. Take nessesary measuress to ensure backside cleanliness to avoid system problems due to wafer handling. Thanks
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