Problem asml SNF 2008-06-14 22:54:07: The output lid locked

sanjah at snf.stanford.edu sanjah at snf.stanford.edu
Sat Jun 14 22:54:08 PDT 2008


Didn't unlock after the wafer was processed. 3 of my wafers in the output casette. If you remove them please put them in the wafer box on the asml table.




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