Shutdown asml SNF 2008-06-18 09:09:09: Focud problem
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Wed Jun 18 09:09:10 PDT 2008
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Problem asml SNF 2008-06-14 22:54:07: The output lid locked
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Shutdown asml SNF 2008-06-18 09:09:09: Focud problem
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Focus and image tilt out of spec. Will notify ASM-L
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Problem asml SNF 2008-06-14 22:54:07: The output lid locked
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Shutdown asml SNF 2008-06-18 09:09:09: Focud problem
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