Shutdown asml SNF 2008-06-18 09:09:09: Focud problem
binder.mann at asml.com
Wed Jun 18 09:16:34 PDT 2008
We will perform monthly PM on the system along with all the follow up
meterlogy checks. Keep you posted with the tool status.
From: gsosa at snf.stanford.edu [mailto:gsosa at snf.stanford.edu]
Sent: Wednesday, June 18, 2008 09:09
To: asml-pcs at snf.stanford.edu
Subject: Shutdown asml SNF 2008-06-18 09:09:09: Focud problem
Focus and image tilt out of spec. Will notify ASM-L
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