Shutdown asml SNF 2008-06-18 09:09:09: Focud problem

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Jun 18 15:14:01 PDT 2008


ASM-L converted the tool to 8.90 software rev. They also checked and updated the system focus/tilts, R/B offsets and redefine the reference state. System is ready to use. Please make coral entries if there are any problems or unusual behavior with the tool. This is important because we need to know if 8.90 software has any problems. Thanks




More information about the asml-pcs mailing list