Shutdown asml SNF 2008-06-18 09:09:09: Focud problem

gsosa at gsosa at
Wed Jun 18 15:14:01 PDT 2008

ASM-L converted the tool to 8.90 software rev. They also checked and updated the system focus/tilts, R/B offsets and redefine the reference state. System is ready to use. Please make coral entries if there are any problems or unusual behavior with the tool. This is important because we need to know if 8.90 software has any problems. Thanks

More information about the asml-pcs mailing list