Comment asml SNF 2008-06-20 18:26:17: Stepper Status 6/20/08

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jun 20 18:26:17 PDT 2008


Vendor daignosed problem. He will replace the rotary assembly tomorrow to repair stone problem. Stepper is back up and ready to use.




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