Shutdown asml SNF 2008-03-16 01:37:58: Wafer in E-Chuck

kwankyu at kwankyu at
Sun Mar 16 01:37:58 PDT 2008

During process, wafer was stuck to P-chuck. To cancel the batch, I stopped the batch. Wafer moved to E-chuck and was stuck to P-chuck. Stop button in the program is not active. 

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