Shutdown asml SNF 2008-03-26 09:51:40: ASML 8" Demo

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Mar 28 16:29:02 PDT 2008


ASM-L S/A 8" demo completed. Tool is converted back to 4" wafer size. All handling calibrations completed and in spec. System operation/alignment tested with test wafers. IQC test results good. System back up for 4" wafer processing. 




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