Shutdown asml SNF 2008-03-26 09:51:40: ASML 8" Demo

gsosa at gsosa at
Fri Mar 28 16:29:02 PDT 2008

ASM-L S/A 8" demo completed. Tool is converted back to 4" wafer size. All handling calibrations completed and in spec. System operation/alignment tested with test wafers. IQC test results good. System back up for 4" wafer processing. 

More information about the asml-pcs mailing list