From masaharu at snf.stanford.edu Sun May 25 08:39:57 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sun, 25 May 2008 08:39:57 -0700 Subject: Problem asml SNF 2008-05-25 08:39:56: solid noise Message-ID: When I was running batch and exposure, I heard solid, unpleasant, noise from the equpiment, From gsosa at snf.stanford.edu Sun May 25 10:59:13 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 25 May 2008 10:59:13 -0700 Subject: Shutdown asml SNF 2008-05-25 10:59:12: Load clunking noise Message-ID: I also heard the noises when running the daily checks. I have never heard these sounds before and I am very concerned. I am shutting the stepper down and will notify ASM-L field service. From gsosa at snf.stanford.edu Tue May 27 15:54:46 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 27 May 2008 15:54:46 -0700 Subject: Comment asml SNF 2008-05-27 15:54:45: Stepper Status-5/27/08 Message-ID: The stepper is still down. FSE troubleshot and determined that the connecting rod for the "Y" stage axis dampening motor had broken. Also, the bracket that the rod connects to is very loose. Vendor will order and replace the connecting rod and tighten up the bracket. ETA for the connecting rod is Thursday(shipping from Veldhoven). Please check back in coral for updates From gsosa at snf.stanford.edu Wed May 28 16:16:52 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 28 May 2008 16:16:52 -0700 Subject: Comment asml SNF 2008-05-28 16:16:52: Update 5/28/2008 Message-ID: ASM-L FSE's worked on stone in/out issues. Tool converted to 6" for metrology setup after new part is installed. New part to arrive in LAX tonight and should be in SJ ASM-L office tomorrow. FSE will return tomorrow to install new part and do metrology setup. From mahnaz at snf.stanford.edu Fri May 30 19:06:18 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 30 May 2008 19:06:18 -0700 Subject: Shutdown asml SNF 2008-05-25 10:59:12: Load clunking noise Message-ID: FMC ( is the broken part) which has been replaced. Two boards were switched off by mistake and that caused some issues . Full Metrology test are done. Red/Blue tests, wafer stage test .Ran hot spot tests I ran few wafers with Paul, Linda and Michael's help. Please run a test wafer or even better Exposure / focus matrix and check things out. Please check back of your wafers for cleanliness and do not run anything unusual this weekend because if you do whole lot of people will hate you. If during the weekend things goes wrong Mary has the SNF cell phone call 650-521-7306 and she will communicate with ASML fse. Please if the system goes down 2 am wait till 8 am, no one can do anything at that time any way. Monday around 11:30 we need to change the lamp. Happy processing From mahnaz at snf.stanford.edu Fri May 30 19:06:34 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 30 May 2008 19:06:34 -0700 Subject: Comment asml SNF 2008-05-27 15:54:45: Stepper Status-5/27/08 Message-ID: noted From mahnaz at snf.stanford.edu Fri May 30 19:06:47 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 30 May 2008 19:06:47 -0700 Subject: Comment asml SNF 2008-05-28 16:16:52: Update 5/28/2008 Message-ID: noted From mahnaz at snf.stanford.edu Fri May 30 19:07:01 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 30 May 2008 19:07:01 -0700 Subject: Problem asml SNF 2008-05-25 08:39:56: solid noise Message-ID: FMC ( is the broken part) which has been replaced. Two boards were switched off by mistake and that caused some issues . Full Metrology test are done. Red/Blue tests, wafer stage test .Ran hot spot tests I ran few wafers with Paul, Linda and Michael's help. Please run a test wafer or even better Exposure / focus matrix and check things out. Please check back of your wafers for cleanliness and do not run anything unusual this weekend because if you do whole lot of people will hate you. If during the weekend things goes wrong Mary has the SNF cell phone call 650-521-7306 and she will communicate with ASML fse. Please if the system goes down 2 am wait till 8 am, no one can do anything at that time any way. Monday around 11:30 we need to change the lamp. Happy processing