Shutdown asml SNF 2008-05-25 10:59:12: Load clunking noise

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sun May 25 10:59:13 PDT 2008

Previous message: Problem asml SNF 2008-05-25 08:39:56: solid noise
Next message: Shutdown asml SNF 2008-05-25 10:59:12: Load clunking noise
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

I also heard the noises when running the daily checks. I have never heard these sounds before and I am very concerned. I am shutting the stepper down and will notify ASM-L field service.

Previous message: Problem asml SNF 2008-05-25 08:39:56: solid noise
Next message: Shutdown asml SNF 2008-05-25 10:59:12: Load clunking noise
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the asml-pcs mailing list