Shutdown asml SNF 2008-05-25 10:59:12: Load clunking noise

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sun May 25 10:59:13 PDT 2008


I also heard the noises when running the daily checks. I have never heard these sounds before and I am very concerned. I am shutting the stepper down and will notify ASM-L field service.




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