Comment asml SNF 2008-05-27 15:54:45: Stepper Status-5/27/08

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue May 27 15:54:46 PDT 2008


The stepper is still down. FSE troubleshot and determined that the connecting rod for the "Y" stage axis dampening motor had broken. Also, the bracket that the rod connects to is very loose. Vendor will order and replace the connecting rod and tighten up the bracket.  ETA for the connecting rod is Thursday(shipping from Veldhoven). Please check back in coral for updates




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