Comment asml SNF 2008-05-28 16:16:52: Update 5/28/2008

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed May 28 16:16:52 PDT 2008


ASM-L FSE's worked on stone in/out issues. Tool converted to 6" for metrology setup after new part is installed. New part to arrive in LAX tonight and should be in SJ ASM-L office tomorrow. FSE will return tomorrow to install new part and do metrology setup.




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