Problem asml SNF 2008-05-25 08:39:56: solid noise

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Fri May 30 19:07:01 PDT 2008


FMC ( is the broken part) which has been replaced.
Two boards were switched  off by mistake and that  caused some issues .
Full Metrology test are done.    Red/Blue tests, wafer stage test .Ran hot spot tests
I ran few wafers with Paul, Linda and Michael's help.
Please run a test wafer or even better  Exposure / focus matrix and check things out.
Please check back of your wafers for cleanliness and do not run anything unusual this weekend because if you do whole lot of people will hate you.
If during the weekend things goes wrong Mary has the SNF cell phone call  650-521-7306 and she will communicate with ASML fse.
Please if the system goes down 2 am wait till 8 am, no one can do anything at that time any way.
Monday around 11:30 we need to change the lamp.
Happy processing 




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