From rostam at snf.stanford.edu Sun Nov 2 16:59:56 2008 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Sun, 2 Nov 2008 16:59:56 -0800 Subject: Problem asml SNF 2008-11-02 16:59:55: log file is full Message-ID: no logging From gsosa at snf.stanford.edu Mon Nov 3 13:39:14 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 3 Nov 2008 13:39:14 -0800 Subject: Problem asml SNF 2008-11-02 16:59:55: log file is full Message-ID: Created new log file . From gsosa at snf.stanford.edu Tue Nov 4 08:58:34 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 4 Nov 2008 08:58:34 -0800 Subject: Shutdown asml SNF 2008-11-04 08:58:33: Lamp Change Message-ID: Vendor is replacing the UV lamp and doing some testing. From gsosa at snf.stanford.edu Tue Nov 4 13:50:06 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 4 Nov 2008 13:50:06 -0800 Subject: Shutdown asml SNF 2008-11-04 08:58:33: Lamp Change Message-ID: Vendor completed the scheduled lamp change. Vendor also did lens transmission tests and collected data. System is back up and ready for use. From dejia at snf.stanford.edu Tue Nov 4 20:58:49 2008 From: dejia at snf.stanford.edu (dejia at snf.stanford.edu) Date: Tue, 4 Nov 2008 20:58:49 -0800 Subject: Problem asml SNF 2008-11-04 20:58:48: energy sensor Message-ID: energy sensor temperature out of range From ericp at snf.stanford.edu Wed Nov 5 01:26:23 2008 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Wed, 5 Nov 2008 01:26:23 -0800 Subject: Problem asml SNF 2008-11-05 01:26:23: trouble with manual pre-align Message-ID: Colby and I tried to manually pre-align our wafer, but we do not see the usual image on the right (pre-align) screen, so we are unable to drive to the mark. Gary observed this problem with us. We'd be happy to demonstrate the problem when the repair service is present. Thanks From rostam at snf.stanford.edu Thu Nov 6 00:41:54 2008 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Thu, 6 Nov 2008 00:41:54 -0800 Subject: Problem asml SNF 2008-11-06 00:41:53: energy sensor temperature out of range Message-ID: the error energy sensor temperature out of range happens almost every time From chen0622 at snf.stanford.edu Thu Nov 6 20:34:50 2008 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Thu, 6 Nov 2008 20:34:50 -0800 Subject: Problem asml SNF 2008-11-06 20:34:49: the screen freeze Message-ID: The program freezed and would not exit during modifying the job. There is no any wafer or any mask inside the machine. From mrlin at snf.stanford.edu Thu Nov 6 23:13:02 2008 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Thu, 6 Nov 2008 23:13:02 -0800 Subject: Shutdown asml SNF 2008-11-06 23:13:02: system errored with wafer inside Message-ID: system crashed/errored while handling wafer; no other error message appeared except "system error"; 1 quartz wafer is stuck inside on p chuck and cannot be removed using "remove wafers from machine". From gsosa at snf.stanford.edu Fri Nov 7 09:04:38 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 7 Nov 2008 09:04:38 -0800 Subject: Shutdown asml SNF 2008-11-06 23:13:02: system errored with wafer inside Message-ID: The wafer slipped off of the pre-aligner station. Retrieved the wafer from system. Wafer looked OK. Cleaned pre-aligner, dipod input arm and robot. Cycled wafers through system. All seems OK. From gsosa at snf.stanford.edu Fri Nov 7 09:05:08 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 7 Nov 2008 09:05:08 -0800 Subject: Problem asml SNF 2008-11-06 20:34:49: the screen freeze Message-ID: System software rebooted From maryamzm at snf.stanford.edu Thu Nov 13 21:42:38 2008 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Thu, 13 Nov 2008 21:42:38 -0800 Subject: Shutdown asml SNF 2008-11-13 21:42:38: Wafers stuck inside Message-ID: There are 3 wafers stuck inside...I tried aborting the batch and doing a full start up ( as it suggested) but it didn't work. The stepper doesn't know where the wafers are...sorry about this :( From emyers at snf.stanford.edu Fri Nov 14 08:40:48 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 14 Nov 2008 08:40:48 -0800 Subject: Comment asml SNF 2008-11-14 08:40:47: Stuck Wafers Message-ID: I looked at two of the wafers Gary was able to retrieve. They had deep scribe marks near the flat and had many scratches on the backside. These were risky wafers to put through the system as we found out. Looks like field service needs to come in and retrieve the final wafer. From gsosa at snf.stanford.edu Fri Nov 14 08:56:18 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 14 Nov 2008 08:56:18 -0800 Subject: Comment asml SNF 2008-11-14 08:56:17: Stuck wafers Message-ID: Removed wafers that were stranded on discharge chuck and robot. Cannot unload wafer stuck on exposure chuck through software commands because the system cannot detect the wafer. Wafer needs to be removed manually by FSE. ASM-L field service have been notified. System is Down From gsosa at snf.stanford.edu Fri Nov 14 15:59:32 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 14 Nov 2008 15:59:32 -0800 Subject: Shutdown asml SNF 2008-11-13 21:42:38: Wafers stuck inside Message-ID: Vendor came in and had to manually remove wafer from Exposure chuck. Wafer has scratches and scribe marks on back of wafer. You can even feel some surface roughness with a gloved finger. Vendor tested and calibrated wafer handling. IQC test looks good. System ready for use. From lwchang at snf.stanford.edu Sat Nov 15 15:02:50 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Sat, 15 Nov 2008 15:02:50 -0800 Subject: Problem asml SNF 2008-11-15 15:02:47: encountered "energy sensor temp out of range" several times Message-ID: From wanki at snf.stanford.edu Mon Nov 17 01:06:52 2008 From: wanki at snf.stanford.edu (wanki at snf.stanford.edu) Date: Mon, 17 Nov 2008 01:06:52 -0800 Subject: Shutdown asml SNF 2008-11-17 01:06:51: Stepper error Message-ID: Stepper can not pick my wafer from the cassete. Error occured and at that time my wafer was in the cassete. So, I aborted my bach and picked out my wafer from the cassete. These was no wafer in the stepper and cassete. From gsosa at snf.stanford.edu Mon Nov 17 09:10:52 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 17 Nov 2008 09:10:52 -0800 Subject: Shutdown asml SNF 2008-11-17 01:06:51: Stepper error Message-ID: Robot could not pick up users wafer from send cassette(Could not sense wafer vacuum). Inspected the robot load arm and found some red residue(probably photoresist) that caused the wafer loading problem. It is unknown when the the arm got contaminated but has probably been causing some intermittant handling errors. Cleaned the residue off with acetone and wipes. Tested wafer loading by cycling 10 wafers through system. All OK. Also ran daily tests- All OK. System is ready for use. From gsosa at snf.stanford.edu Wed Nov 19 09:59:53 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 19 Nov 2008 09:59:53 -0800 Subject: Shutdown asml SNF 2008-11-19 09:59:52: Monthly PM Message-ID: Vendor will do a monthly PM From gsosa at snf.stanford.edu Wed Nov 19 17:57:53 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 19 Nov 2008 17:57:53 -0800 Subject: Comment asml SNF 2008-11-19 17:57:52: The stepper is down Message-ID: The stepper is down tonight and ASM-L FSE's will continue to work on problems tomorrow. So sorry for the inconvenience. From gsosa at snf.stanford.edu Thu Nov 20 16:18:45 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 20 Nov 2008 16:18:45 -0800 Subject: Comment asml SNF 2008-11-20 16:18:45: Update 11/20/08 Message-ID: The stepper is still down. The stone in and out problem has been fixed. However, the tool was open for a few hours and needs to stabilize. Also during the repair of the stone in/out, the stone position has changed. Tool will stabilize overnight and FSE will return to do complete metrology setup and re-baseline the system. Many apologies for the extended downtime. From gsosa at snf.stanford.edu Fri Nov 21 15:43:13 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Nov 2008 15:43:13 -0800 Subject: Comment asml SNF 2008-11-19 17:57:52: The stepper is down Message-ID: The monthly PM is completed. The stone in/out problems have been resolved. All baseline setups have been completed(red / white light focus, red/blue and 3D align ) All systems OK. System is ready for use. From gsosa at snf.stanford.edu Fri Nov 21 15:42:59 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Nov 2008 15:42:59 -0800 Subject: Comment asml SNF 2008-11-20 16:18:45: Update 11/20/08 Message-ID: The monthly PM is completed. The stone in/out problems have been resolved. All baseline setups have been completed(red / white light focus, red/blue and 3D align ) All systems OK. System is ready for use. From gsosa at snf.stanford.edu Fri Nov 21 15:43:25 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Nov 2008 15:43:25 -0800 Subject: Shutdown asml SNF 2008-11-19 09:59:52: Monthly PM Message-ID: The monthly PM is completed. The stone in/out problems have been resolved. All baseline setups have been completed(red / white light focus, red/blue and 3D align ) All systems OK. System is ready for use. From gsosa at snf.stanford.edu Fri Nov 21 18:23:22 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Nov 2008 18:23:22 -0800 Subject: Shutdown asml SNF 2008-11-21 18:23:22: Alignment Problems Message-ID: 2 users have experienced misalignment problems. The mis-alignment appears to be rotation. Chris from ASML is coming in to try and resolve the problem. From gsosa at snf.stanford.edu Fri Nov 21 22:02:27 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Nov 2008 22:02:27 -0800 Subject: Shutdown asml SNF 2008-11-21 18:23:22: Alignment Problems Message-ID: Chris from ASML checked and updated Basic Machine constants for front and backside alignment. Verified front and backside alignment with users wafers. Alignment looked good. Thank you Joey Doll for providing us with wafers to verify integrity of both alignmnet systems. Will continue to monitor the system throughout the weekend so please report any issues that you encounter in Coral. From jrjain at snf.stanford.edu Sun Nov 23 20:09:00 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Sun, 23 Nov 2008 20:09:00 -0800 Subject: Shutdown asml SNF 2008-11-23 20:09:00: System Error Message-ID: After successfully exposing 2:3 wafers, system gave error and aborted batch. Wafer 1 is on robot, wafer 2 is on E-chuck, and wafer 3 was indicated to be on P-chuck. After doing FAST system startup as tool suggested, wafer 3 "vanished." Error log ssuggests that wafer was lost during transfer from P to E chucks. All wafers are currently stuck inside the tool. These wafers have been checked by Gary and successfully run through the tool before. From gsosa at snf.stanford.edu Mon Nov 24 09:14:16 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Nov 2008 09:14:16 -0800 Subject: Shutdown asml SNF 2008-11-23 20:09:00: System Error Message-ID: Wafer take-over from robot to P/A failed (wafer not sensed). Retrieved stranded wafer and cleaned pre-aligner chuck, Re-tried users wafer 2 times with no success, Back of wafer looks OK and wafer floats on granite. Tried with maint test wafers- all handling OK. User wafer may be slightly warped. Did daily tests. System OK to use.