Shutdown asml SNF 2008-11-04 08:58:33: Lamp Change
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Tue Nov 4 08:58:34 PST 2008
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Problem asml SNF 2008-11-02 16:59:55: log file is full
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Shutdown asml SNF 2008-11-04 08:58:33: Lamp Change
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Vendor is replacing the UV lamp and doing some testing.
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Problem asml SNF 2008-11-02 16:59:55: log file is full
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Shutdown asml SNF 2008-11-04 08:58:33: Lamp Change
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