Problem asml SNF 2008-11-05 01:26:23: trouble with manual pre-align

ericp at snf.stanford.edu ericp at snf.stanford.edu
Wed Nov 5 01:26:23 PST 2008


Colby and I tried to manually pre-align our wafer, but we do not see the usual image on the right (pre-align) screen, so we are unable to drive to the mark.  Gary observed this problem with us.  We'd be happy to demonstrate the problem when the repair service is present. 
Thanks




More information about the asml-pcs mailing list