Shutdown asml SNF 2008-11-06 23:13:02: system errored with wafer inside

mrlin at mrlin at
Thu Nov 6 23:13:02 PST 2008

system crashed/errored while handling wafer;
no other error message appeared except "system error";
1 quartz wafer is stuck inside on p chuck and cannot be removed using "remove wafers from machine".

More information about the asml-pcs mailing list