Shutdown asml SNF 2008-11-06 23:13:02: system errored with wafer inside

mrlin at snf.stanford.edu mrlin at snf.stanford.edu
Thu Nov 6 23:13:02 PST 2008


system crashed/errored while handling wafer;
no other error message appeared except "system error";
1 quartz wafer is stuck inside on p chuck and cannot be removed using "remove wafers from machine".




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