Shutdown asml SNF 2008-11-06 23:13:02: system errored with wafer inside

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Nov 7 09:04:38 PST 2008


The wafer slipped off of the pre-aligner station. Retrieved the wafer from system. Wafer looked OK. Cleaned  pre-aligner, dipod input arm and robot. Cycled wafers through system. All seems OK.




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