Shutdown asml SNF 2008-11-13 21:42:38: Wafers stuck inside

maryamzm at maryamzm at
Thu Nov 13 21:42:38 PST 2008

There are 3 wafers stuck inside...I tried aborting the batch and doing a  full start up ( as it suggested) but it didn't work. The stepper doesn't know where the wafers are...sorry about this :(

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