Comment asml SNF 2008-11-14 08:40:47: Stuck Wafers

emyers at snf.stanford.edu emyers at snf.stanford.edu
Fri Nov 14 08:40:48 PST 2008


I looked at two of the wafers Gary was able to retrieve.  They had deep scribe marks near the flat and had many scratches on the backside.  These were risky wafers to put through the system as we found out.  Looks like field service needs to come in and retrieve the final wafer.




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