Comment asml SNF 2008-11-14 08:56:17: Stuck wafers

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Nov 14 08:56:18 PST 2008


Removed wafers that were stranded on discharge chuck and robot. Cannot unload wafer stuck on exposure chuck through software commands because the system cannot detect the wafer. Wafer needs to be removed manually by FSE. ASM-L field service have been notified.  System is Down




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