Shutdown asml SNF 2008-11-13 21:42:38: Wafers stuck inside

gsosa at gsosa at
Fri Nov 14 15:59:32 PST 2008

Vendor came in and had to manually remove wafer from Exposure chuck.  Wafer has scratches and scribe marks on back of  wafer. You can even feel some surface roughness with a gloved finger. Vendor tested  and calibrated wafer handling. IQC test looks good. System ready for use.

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