Problem asml SNF 2008-11-15 15:02:47: encountered "energy sensor temp out of range" several times
lwchang at snf.stanford.edu
lwchang at snf.stanford.edu
Sat Nov 15 15:02:50 PST 2008
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Comment asml SNF 2008-11-14 08:56:17: Stuck wafers
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Shutdown asml SNF 2008-11-17 01:06:51: Stepper error
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Comment asml SNF 2008-11-14 08:56:17: Stuck wafers
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Shutdown asml SNF 2008-11-17 01:06:51: Stepper error
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