Shutdown asml SNF 2008-11-17 01:06:51: Stepper error

wanki at snf.stanford.edu wanki at snf.stanford.edu
Mon Nov 17 01:06:52 PST 2008


Stepper can not pick my wafer from the cassete. Error occured and at that time my wafer was in the cassete. So, I aborted my bach and picked out my wafer from the cassete.
These was no wafer in the stepper and cassete.




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